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Effect of ozone supply methods on PRE in alkaline ozone solutionsGo to Link

Lee, Seung Ho; Kim, Tae Gon; Kwon, Tae Young; Park, Jin-Goo; Bae, So Ik; Lee, Gun Ho; Kim, In Jung

ArticleIssue Date2008CitationSolid State Phenomena, v.134, pp 237 - 240PublisherScitec Publications Ltd.
SCIESCOPUS
Reevaluation of hydrogen gas dissolved cleaning solutions in single wafer megasonic cleaningGo to Link

Kang, Bong Kyun; Lee, Seung Ho; Kim, In Jung; Choi, Eun Suck; Kim, Bong Woo; Busnaina, Ahmed.A.; Hattori, Takeshi; Park, Jin-Goo

ArticleIssue Date2009CitationECS Transactions, v.25, no.5, pp 273 - 279PublisherElectrochemical Society, Inc.
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