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Effect of ozone supply methods on PRE in alkaline ozone solutions
- Authors
- Lee, Seung Ho; Kim, Tae Gon; Kwon, Tae Young; Park, Jin-Goo; Bae, So Ik; Lee, Gun Ho; Kim, In Jung
- Issue Date
- Dec-2007
- Publisher
- Scitec Publications Ltd.
- Keywords
- Additive gases; Alkaline solution; Ozone; Ozone supply methods; Particle removal
- Citation
- Solid State Phenomena, v.134, pp 237 - 240
- Pages
- 4
- Indexed
- SCIE
SCOPUS
- Journal Title
- Solid State Phenomena
- Volume
- 134
- Start Page
- 237
- End Page
- 240
- ISSN
- 1012-0394
1662-9779
- Abstract
- Ozonated DI water was supplied to make alkaline cleaning solutions to replace SC1 chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonated water with NH4OH to a bath without recirculation resulted in higher PRE over 93 %. © (2008) Trans Tech Publications, Switzerland.
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)