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Browsing by Kim, In-GonAuthor

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A novel approach for scratch detection and study on dependency of scratches during oxide CMP

Kim, In-Gon; Kim, In-Kwon; Prasad, Y. Nagendra; Park, Jin-Goo

ArticleIssue Date2009Citation2009 ICPT, pp 307 - 312PublisherJapan planarization and CMP technical committee

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Analysis of Scratches Formed on Oxide Surface during Chemical Mechanical Planarization Go to Link

Choi, Jae-Gon; Prasad, Y. Nagendra; Kim, In-Kwon; Kim, In-Gon; Kim, Woo-Jin; Busnaina, Ahmed A.; Park, Jin-Goo

ArticleIssue Date2010CitationJournal of the Electrochemical Society, v.157, no.2, pp H186 - H191PublisherElectrochemical Society, Inc.

SCISCIESCOPUS

Generation of Pad Debris during Oxide CMP Process and Its Role in Scratch Formation Go to Link

Prasad, Y. Nagendra; Kwon, Tae-Young; Kim, In-Kwon; Kim, In-Gon; Park, Jin-Goo

ArticleIssue Date2011CitationJournal of the Electrochemical Society, v.158, no.4, pp H394 - H400PublisherElectrochemical Society, Inc.

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Browsing by Kim, In-GonAuthor

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