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SCIESCOPUS
CMP defects; Their detection and analysis on root causesGo to Link

Park, Jin-Goo; Kwon, Tae Young; Venkatesh, R.P.; Cho, Byoung jun

ArticleIssue Date2012CitationECS Transactions, v.44, no.1, pp 559 - 564PublisherElectrochemical Society, Inc.
SCIESCOPUS
Effect of ozone supply methods on PRE in alkaline ozone solutionsGo to Link

Lee, Seung Ho; Kim, Tae Gon; Kwon, Tae Young; Park, Jin-Goo; Bae, So Ik; Lee, Gun Ho; Kim, In Jung

ArticleIssue Date2008CitationSolid State Phenomena, v.134, pp 237 - 240PublisherScitec Publications Ltd.
Effects of additives in KOH based electrolytes on Cu ECMP

Kwon, Tae Young; Kim, In-Kwon; Park, Jin-Goo

ConferenceIssue Date2007PlaceSan Francisco, CA
SCOPUS
Material removal mechanism of single and polycrystalline silicon in alkaline slurryGo to Link

Park, Jin-Goo; Prasanna, Venkatesh R.; Kwon, Tae Young

ArticleIssue Date2013CitationECS Transactions, v.52, no.1, pp 545 - 550PublisherElectrochemical Society, Inc.
SCOPUS
Post W CMP cleaning without HF cleansGo to Link

Kang, Young-Jae; Yang, Chan Ki; Kwon, Tae Young; Park, Jin-Goo; Jo, Jung Hun; Lim, Geun Sik

ArticleIssue Date2007CitationECS Transactions, v.11, no.2, pp 441 - 445PublisherElectrochemical Society, Inc.
SCIESCOPUS
SAM modification of CMP conditioner for the prevention of particle adhesionGo to Link

Kwon, Tae Young; Kang, Young-Jae; Kim, In-Kwon; Kim, Dong Chan; Kim, Jeong; Chun, Jong sun; Park, Mun seak; Park, Jin-Goo

ArticleIssue Date2009CitationECS Transactions, v.25, no.5, pp 95 - 99PublisherElectrochemical Society, Inc.
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