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SCIESCOPUS
Comparative study of the growth characteristics and electrical properties of atomic-layer-deposited HfO2 films obtained from metal halide and amide precursorsGo to Link

Oh, Il-Kwon; Park, Bo-Eun; Seo, Seunggi; Yeo, Byung Chul; Tanskanen, Jukka; Lee, Han-Bo-Ram; Kim, Woo-Hee; Kim, Hyungjun

ArticleIssue Date2018CitationJournal of Materials Chemistry C, v.6, no.27, pp.7367 - 7376PublisherRoyal Society of Chemistry
SCIESCOPUS
Effects of Ar Addition to O-2 Plasma on Plasma-Enhanced Atomic Layer Deposition of Oxide Thin FilmsGo to Link

Jung, Hanearl; Oh, Il-Kwon; Yoon, Chang Mo; Park, Bo-Eun; Lee, Sanghun; Kwon, Ohyung; Lee, Woo Jae; Kwon, Se-Hun; Kim, Woo-Hee; Kim, Hyungjun

ArticleIssue Date2018CitationACS Applied Materials and Interfaces, v.10, no.46, pp.40286 - 40293PublisherAmerican Chemical Society
SCIESCOPUS
Enhanced Light Stability of InGaZnO Thin-Film Transistors by Atomic-Layer-Deposited Y2O3 with OzoneGo to Link

Jung, Hanearl; Kim, Woo-Hee; Park, Bo-Eun; Woo, Whan Je; Oh, Il-Kwon; Lee, Su Jeong; Kim, Yun Cheol; Myoung, Jae-Min; Gatineau, Satoko; Dussarrat, Christian, et al.

ArticleIssue Date2018CitationACS Applied Materials and Interfaces, v.10, no.2, pp.2143 - 2150PublisherAmerican Chemical Society
SCIESCOPUS
Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodesGo to Link

Lee, Jae Hwan; Park, Bo-Eun; Thompson, David; Choe, Myeonggi; Lee, Zonghoon; Oh, Il-Kwon; Kim, Woo-Hee; Kim, Hyungjun

ArticleIssue Date2020CitationThin Solid Films, v.701, pp 1 - 8PublisherElsevier Sequoia
SCIESCOPUS
Phase-controlled synthesis of SnOx thin films by atomic layer deposition and post-treatmentGo to Link

Park, Bo-Eun; Park, Jaehong; Lee, Sangyoon; Lee, Sanghun; Kim, Woo-Hee; Kim, Hyungjun

ArticleIssue Date2019CitationApplied Surface Science, v.480, pp.472 - 477PublisherElsevier BV
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