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Browsing by Park, SungmoAuthor

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Characterization of Free-Standing Nano-Membranes by Using Ellipsometry Go to Link

Park, Sungmo; Lee, Changho; An, Ilsin; Kim, Min-Su; Park, Jin-Goo; Ahn, Jin-ho

ArticleIssue Date2018CitationJournal of the Korean Physical Society, v.72, no.8, pp 868 - 872Publisher한국물리학회

SCIESCOPUS

Comparison imaging ellipsometry and its application to crystallization of indium oxide thin films Go to Link

Park, Sungmo; Lee, Jungtae; Kim, Hyunjin; Kim, Jaekyun; Kim, Suenne; An, Ilsin

ArticleIssue Date2019CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.37, no.6PublisherA V S AMER INST PHYSICS

SCISCIESCOPUS

Comparison null imaging ellipsometry using polarization rotator Go to Link

Park, Sungmo; Kim, Eunsung; Kim, Jiwon; An, Ilsin

ArticleIssue Date2018CitationJapanese Journal of Applied Physics, v.57, no.5, pp 1 - 6PublisherIOP Publishing Ltd

Development of micro-spot spectroscopic ellipsometer using reflective objectives Go to Link

안일신; Park, Geonu; Park, Sungmo

ArticleIssue Date2017CitationInvertis Journal of Science and Technology, v.10, no.3, pp.142 - 147PublisherSociety for Semiconductor Devices (SSD)

SCIESCOPUS

Polarization errors associated with reflective objectives in a micro-spot spectroscopic ellipsometer Go to Link

Park, Sungmo; An, Ilsin

ArticleIssue Date2019CitationJAPANESE JOURNAL OF APPLIED PHYSICS, v.58, no.5PublisherIOP PUBLISHING LTD

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Browsing by Park, SungmoAuthor

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