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Browsing by Venkatesh, R. PrasannaAuthor

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Characterization of TMAH based cleaning solution for post Cu-CMP application Go to Link

Venkatesh, R. Prasanna; Kwon, Tae-Young; Prasad, Y. Nagendra; Ramanathan, S.; Park, Jin-Goo

ArticleIssue Date2013CitationMicroelectronic Engineering, v.102, pp 74 - 80PublisherElsevier BV

SCOPUS

Contamination Removal From UV and EUV Photomasks

Venkatesh, R. Prasanna; Kim, Min su; Park, Jin-Goo

ArticleIssue Date2017CitationDevelopments in Surface Contamination and Cleaning, v.9, pp 135 - 173PublisherElsevier Inc.

SCISCIESCOPUS

Effect of Alkaline pH on Polishing and Etching of Single and Polycrystalline Silicon Go to Link

Venkatesh, R. Prasanna; Prasad, Y. Nagendra; Kwon, Tae-Young; Kang, Young-Jae; Park, Jin-Goo

ArticleIssue Date2012CitationJapanese Journal of Applied Physics, v.51, no.7, pp 1 - 6PublisherIOP Publishing Ltd

SCISCIESCOPUS

Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process Go to Link

Venkatesh, R. Prasanna; Cho, Byoung Jun; Ramanathan, S.; Park, Jin-Goo

ArticleIssue Date2012CitationJournal of the Electrochemical Society, v.159, no.11, pp C447 - C452PublisherElectrochemical Society, Inc.

SCISCIESCOPUS

Enhanced Fluorescence by Controlled Surface Roughness of Plastic Biochip Go to Link

Kim, Dong-Jin; Lee, Jung-Hwan; Cho, Si-Hyeong; Rizwan, Muhammad; Venkatesh, R. Prasanna; Chung, Bong Guen; Park, Jin-Goo

ArticleIssue Date2011CitationJapanese Journal of Applied Physics, v.50, no.6, pp 1 - 4PublisherIOP Publishing Ltd

SCISCIESCOPUS

Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing Go to Link

Kim, Hyuk-Min; Venkatesh, R. Prasanna; Kwon, Tae-Young; Park, Jin-Goo

ArticleIssue Date2012CitationColloids and Surfaces A: Physicochemical and Engineering Aspects, v.411, pp 122 - 128PublisherElsevier BV

SCIESCOPUS

Modification of Diamond Conditioner with V-SAM Coatings for Corrosion Prevention During Metal CMP Go to Link

Cho, Byoung-Jun; Venkatesh, R. Prasanna; Kwon, Tae-Young; Park, Jin-Goo

ArticleIssue Date2013CitationInternational Journal of Electrochemical Science, v.8, no.4, pp 4723 - 4734PublisherElectrochemical Science Group, University of Belgrade

SCISCIESCOPUS

Random yield loss during wafer cleaning Go to Link

Venkatesh, R. Prasanna; Lim, Jung-Soo; Park, Jin-Goo

ArticleIssue Date2011CitationSolid State Technology, v.54, no.4, pp 16 - 18PublisherPennWell Corp.

SCISCIESCOPUS

The effect of pumping methods on wet etching processes Go to Link

Lim, Jung-Soo; Venkatesh, R. Prasanna; Park, Jin-Goo

ArticleIssue Date2012CitationSolid State Technology, v.55, no.3, pp 18 - 21+32PublisherPennWell Corp.

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