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Browsing by Yoon, Chang MoAuthor

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Effect of Al doping on structural and electrical properties of HfO2/ZrO2 layered structures for high-k applications Go to Link

Jeon, Yeon-Ji; Lee, Seung Won; Shin, Yoonchul; Kim, Ji Hwan; Yoon, Chang Mo; Ahn, Ji-Hoon

ArticleIssue Date2025CitationJournal of Alloys and Compounds, v.1010, pp 1 - 7PublisherElsevier Ltd

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Effects of Ar Addition to O-2 Plasma on Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films Go to Link

Jung, Hanearl; Oh, Il-Kwon; Yoon, Chang Mo; Park, Bo-Eun; Lee, Sanghun; Kwon, Ohyung; Lee, Woo Jae; Kwon, Se-Hun; Kim, Woo-Hee; Kim, Hyungjun

ArticleIssue Date2018CitationACS Applied Materials and Interfaces, v.10, no.46, pp.40286 - 40293PublisherAmerican Chemical Society

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Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al2O3 Nanopatterns Go to Link

Seo, Seunggi; Yeo, Byung Chul; Han, Sang Soo; Yoon, Chang Mo; Yang, Joon Young; Yoon, Jonggeun; Yoo, Choongkeun; Kim, Ho-jin; Lee, Yong-baek; Lee, Su Jeong, et al.

ArticleIssue Date2017CitationACS Applied Materials and Interfaces, v.9, no.47, pp.41607 - 41617PublisherAmerican Chemical Society

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Browsing by Yoon, Chang MoAuthor

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