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1. Journal Articles(COLLEGE OF ENGINEERING SCIENCES > MAJOR IN APPLIED MATERIAL & COMPONENTS > 1. Journal Articles)45

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Collection's Items (Sorted by Issue Date in Descending order): 41 to 45 of 45

SCOPUS
Removal of organic wax and particles on silicon after batch type polishing by ozonated DI waterGo to Link

Yi, Jae Hwan; Lee, Seung Ho; Kim, Tae Gon; Park, Jin-Goo; Lee, Gun Ho; Bae, So Ik

ArticleIssue Date2007CitationECS Transactions, v.11, no.2, pp 79 - 84PublisherElectrochemical Society, Inc.
SCOPUS
Effect of particle deposition and wet/dry cleaning methods on particle removal efficiencyGo to Link

Kim, Tae Gon; Hu, Shan; Busnaina, Ahmed.A.; Park, Jin-Goo

ArticleIssue Date2007CitationECS Transactions, v.11, no.2, pp 361 - 367PublisherElectrochemical Society, Inc.
SCOPUS
Surface preparation in CMP process; post CMP cleaning and defectsGo to Link

Park, Jin-Goo; Kim, Tae Gon

ArticleIssue Date2007CitationECS Transactions, v.11, no.2, pp 419 - 430PublisherElectrochemical Society, Inc.
SCOPUS
Development of post Ru CMP cleaning solutionsGo to Link

Kim, In-Kwon; Cho, Byung-Gwun; Kim, Tae Gon; Park, Jin-Goo

ArticleIssue Date2007CitationICPT 2007 - International Conference on Planarization/CMP Technology, Proceedings, pp 283 - 287PublisherVDE Verlag GmbH
SCOPUS
Characteristics of high power laser shock waves and their cleaning performanceGo to Link

Kim, Tae Gon; Yoo, Young Sam; Son, Il Ryong; Jang, Deoksuk; Kim, Dongsik; Lee, Jong Myung; Choi, Jae Sung; Busnaina, Ahmed .A.; Park, Jin-Goo

ArticleIssue Date2007CitationECS Transactions, v.11, no.2, pp 41 - 46PublisherElectrochemical Society, Inc.
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