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Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin filmsopen access
- Authors
- Park, Soobin; Seo, Jinmyeong; Park, Jungjoon; Hwang, Inseong; Lee, Han-Seung; Jung, Hyunsung; Yoo, Bongyoung
- Issue Date
- Jul-2022
- Publisher
- Nature Publishing Group
- Citation
- Scientific Reports, v.12, no.1, pp.1 - 8
- Indexed
- SCIE
SCOPUS
- Journal Title
- Scientific Reports
- Volume
- 12
- Number
- 1
- Start Page
- 1
- End Page
- 8
- ISSN
- 2045-2322
- Abstract
- The fabrication of freestanding bendable films without polymer substrates is demonstrated as a capacitive humidity-sensing material. The bendable and porous SiO2/Si films are simply prepared by electrochemical-assisted stripping, metal-assisted chemical etching, followed by oxidation procedures. The capacitive humidity-sensing properties of the fabricated porous SiO2/Si film are characterized as a function of the relative humidity and frequency. The remarkable sensing performance is demonstrated in the wide RH range from 13.8 to 79.0%. The sensing behavior of the porous SiO2/Si film is studied by electrochemical impedance spectroscopy analysis. Additionally, the reliability of the porous SiO2/Si sensing material is confirmed by cyclic and long-term sensing tests.
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Related Researcher
- Lee, Han Seung
- ERICA 공학대학 (MAJOR IN ARCHITECTURAL ENGINEERING)