Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
- Authors
- Han, Soyoung; Yerriboina, Nagendra Prasad; Sahoo, Bichitra Nanda; Kang, Bong Kyun; Klipp, Andreas; Park, Jin Goo
- Issue Date
- Feb-2021
- Publisher
- Scientific.net
- Keywords
- Acoustic cavitation; Anionic Surfactant; EUV mask cleaning; Megasonic cleaning
- Citation
- Solid State Phenomena, v.314, pp 197 - 201
- Pages
- 5
- Indexed
- SCOPUS
- Journal Title
- Solid State Phenomena
- Volume
- 314
- Start Page
- 197
- End Page
- 201
- ISSN
- 1012-0394
1662-9779
- Abstract
- Megasonic cleaning is one of the promising technologies to remove the particles during semiconductor processing. Acoustic bubble cavitation plays a key role in removing the particles. In this work, the effect of an anionic surfactant sodium dodecyl sulfate (SDS) on a bubble in the presence of hydrogen dissolved DIW water was studied. The bubble dynamics were observed using a highspeed camera. It was found that with the increase of surfactant the bubble characteristics were changed very significantly. Several parameters affecting the bubble dynamics were investigated.
- Files in This Item
- Go to Link
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)