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Properties of PECVD films for IC fabrication
- Authors
- 심종인
- Issue Date
- Apr-1985
- Publisher
- Seoul Nat.Univ.
- Citation
- Seoul Nat.Univ.Eng.Rep
- Indexed
- DOMESTIC
- Journal Title
- Seoul Nat.Univ.Eng.Rep
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Related Researcher
- Shim, Jong In
- ERICA 첨단융합대학 (ERICA 반도체·디스플레이공학전공)