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Atomic layer deposition of Ru thin film using a newly synthesized precursor with open-coordinated ligands
- Authors
- 박태주
- Issue Date
- 15-Feb-2023
- Place
- 강원도 하이원리조트
- Conference Name
- 제30회 한국반도체학술대회
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Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)