Fabrication of humidity monitoring sensor using porous silicon nitride structures for alkaline conditionsopen access
- Authors
- Park, Soobin; Hwang, Inseong; Park, Jae Chan; Park,Tae Joo; Lee, Han-Seung; Lee, Sang Yeon; Yang, Hyun-Min; Yoo, Bongyoung
- Issue Date
- Dec-2024
- Publisher
- Elsevier B.V.
- Keywords
- Alkaline conditions; Humidity sensor; Mace process; Porous silicon nitride
- Citation
- Sensors and Actuators Reports, v.8, pp 1 - 8
- Pages
- 8
- Indexed
- SCOPUS
ESCI
- Journal Title
- Sensors and Actuators Reports
- Volume
- 8
- Start Page
- 1
- End Page
- 8
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/119520
- DOI
- 10.1016/j.snr.2024.100203
- ISSN
- 2666-0539
- Abstract
- Porous silicon nitride structures were fabricated for a humidity sensor. The porous silicon structures were fabricated by the metal-assisted chemical etching process, and the conformal silicon nitride thin film was deposited by the atomic layer deposition process. The optimized porous sensor with the 10 nm-thick silicon nitride thin film had a hydrophilic surface and compared to other sensors, had an excellent humidity sensing response. Especially, it showed a superior humidity sensing response at 1 kHz with fast response and recovery times of 13.3 s and 12.4 s, respectively, were observed. Based on the electrochemical impedance spectroscopy results, the equivalent circuits and humidity sensing mechanism were discussed. The chemical stability of the silicon nitride was characterized using Tafel analysis in alkaline electrolytes. Additionally, the sensor's humidity sensing capabilities were tested under cement-embedded conditions. © 2024
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Collections - COLLEGE OF ENGINEERING SCIENCES > ERICA 지속가능건축융합전공 > 1. Journal Articles
- COLLEGE OF ENGINEERING SCIENCES > MAJOR IN ARCHITECTURAL ENGINEERING > 1. Journal Articles
- COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 1. Journal Articles
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