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Molecular Layer Deposition of a Tin-Based Organic-Inorganic Hybrid Thin Films for Photoresist
- Authors
- 박태주
- Issue Date
- 12-Nov-2024
- Place
- 부산 파라다이스 호텔
- Conference Name
- KISM 2024
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Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)