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Enhanced Deposition Selectivity of High-k Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors
- Authors
- 김우희
- Issue Date
- 24-May-2024
- Conference Name
- 한국반도체디스플레이기술학회 국내학술대회
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)