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Zr 도핑이 AZO 박막의 물성에 미치는 영향Effects of zirconium-doping on the properties of AZO films
- Other Titles
- Effects of zirconium-doping on the properties of AZO films
- Issue Date
- Jul-2016
- Publisher
- 대한전기학회
- Citation
- 2016년도 대한전기학회 하계학술대회논문집, pp 1163 - 1164
- Pages
- 2
- Indexed
- OTHER
- Journal Title
- 2016년도 대한전기학회 하계학술대회논문집
- Start Page
- 1163
- End Page
- 1164
- Abstract
- In this study, Zr-Al-Zn-O (ZAZO) thin films were deposited on glass substrates at room temperature via co-sputtering. The effects of Zr doping on the chemical, structural and optical properties of AZO films were investigated using EDAX, X-ray diffraction, and UV/Vis spectrometer. It was observed that the structure of the ZAZO film changed from polycrystalline into amorphous and their optical bandgap energy increased as the power applied to the ZrO 2 target.
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Related Researcher
- PARK, JIN SEOK
- ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)