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Multifunctional Ru-AlN heating resistor films for high efficiency inkjet printhead
- Authors
- Choi, Woo-Chang; Wan, Zhixin; Ahn, Ji-Hoon; Kim, Doo-In; Shin, Seung-Yong; Moon, Kyung-Il; Park, Jin-Seong; Kwon, Jung-Dae; Kwon, Se-Hun
- Issue Date
- May-2014
- Publisher
- Kluwer Academic Publishers
- Keywords
- Thermal inkjet printer; Platinum group metals; Plasma-enhanced atomic layer deposition; Multifunctional thin films
- Citation
- Journal of Electroceramics, v.32, no.2-3, pp 240 - 245
- Pages
- 6
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- Journal of Electroceramics
- Volume
- 32
- Number
- 2-3
- Start Page
- 240
- End Page
- 245
- ISSN
- 1385-3449
1573-8663
- Abstract
- Ru-AlN thin films were suggested as a novel multifunctional heating resistor film for non-passivated type thermal inkjet printer devices. Ru-AlN thin films were prepared by plasma-enhanced atomic layer deposition in order to intermix Ru and AlN precisely. When the Ru intermixing ratios were optimized, Ru-AlN films showed a favorable electrical resistivity (from 490.9 to 75.3 mu Omega cm) and minimized temperature coefficient of resistance (TCR) values (from 335 to 360 ppm/K). Moreover, the Ru-AlN films showed a strong oxidation resistant as compared with commercially used TaN0.8 films because the prepared Ru-AlN thin films had a typical nanocomposite structure. By applying electrical pulses to the heater device using Ru-AlN thin films for a Joule heating, a reliable operation was also proven.
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Related Researcher
- Ahn, Ji Hoon
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)