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ILD CMP중 Scratch 감소를 위한 CMP 공정기술 개발
- Authors
- 박진구
- Issue Date
- 18-Jun-2009
- Place
- 창원, 한국
- Conference Name
- 2009년 하계 전기전자재료학회
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)