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Preface-JSS Focus Issue on CMP for Sub-10 nm Technologies
- Authors
- Philipossian, Ara; Park, Jin-Goo
- Issue Date
- May-2019
- Publisher
- Electrochemical Society, Inc.
- Citation
- ECS Journal of Solid State Science and Technology, v.8, no.5, pp Y1 - Y1
- Indexed
- SCIE
SCOPUS
- Journal Title
- ECS Journal of Solid State Science and Technology
- Volume
- 8
- Number
- 5
- Start Page
- Y1
- End Page
- Y1
- ISSN
- 2162-8769
2162-8777
- Files in This Item
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)