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C4F8을 이용한 나노미터 두께를 가지는 Hot Embossing 용 마스터의 점착방지막 형성

Authors
박진구
Issue Date
14-May-2004
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/30598
Place
강릉대학교
Conference Name
2004 한국재료학회 춘계학술대회
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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Park, Jin Goo
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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