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TEOS 산화막 위에 기상증착을 통해 성장죈 불화유기박막의 특성평가
- Authors
- 박진구
- Issue Date
- 12-Nov-1999
- Place
- 한양대
- Conference Name
- 한국마이크로전자 및 패키징학회 추계 기술심포지움
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)