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희석된 HF 수용액과 IPA, 계면활성제, 과산화수소를 첨가한 혼합액의 실리콘 산화막 식각속도에 대한연구
- Authors
- 박진구
- Issue Date
- 5-Nov-1999
- Place
- 인하대학교
- Conference Name
- 한국재료학회 추계 학술발표강연
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)