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기상증착과 PECVD를 이용한 불화유기박막의 증착

Authors
박진구
Issue Date
5-Nov-1999
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/33460
Place
인하대학교
Conference Name
한국재료학회 추계 학술발표강연
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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Park, Jin Goo
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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