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Variable angle spectroscopic ellipsometry를 이용한 aluminum위의 불화 유기박막에대한 두께 및 광학 특성결정

Authors
박진구
Issue Date
1-Nov-1998
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/34214
Conference Name
한국재료학회
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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Park, Jin Goo
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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