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CMP 공정에서 Slurry particle과 Wafer표면간의 상호작용에 대한 연구
- Authors
- 박진구
- Issue Date
- 1-Nov-1997
- Conference Name
- 한국재료학회 추계학술대회
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)