Direct growth of carbon nanotubes on a conical tip as a micro-focused x-ray generation source: Effects of various composition ratios of co-sputtered Ni and Co catalysts
- Authors
- Kim, Jong pil; Park, Chang kyun; Yun, Sung jun; Kim, Won; Kim, Young kwang; Park, Jin-Seok
- Issue Date
- Jul-2007
- Publisher
- IEEE
- Citation
- International Vacuum Nanoelectronics Conference, pp.185 - 186
- Indexed
- SCIE
SCOPUS
- Journal Title
- International Vacuum Nanoelectronics Conference
- Start Page
- 185
- End Page
- 186
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/43550
- DOI
- 10.1109/IVNC.2007.4480987
- ISSN
- 2164-2370
- Abstract
- In this study, we first present the experimental results that regard the direct growth of CNTs on a conical-type tungsten (W) tip and their electron emission properties, in terms of the catalyst materials such as a nickel (Ni) and a cobalt (Co) as well as their composition ratios. Sharpening of W-tips was done by electrochemical etch and their diameters were controlled to range from 5 mum down to sub-mum. The co-sputtering method using Ni and Co targets was used to deposit the catalyst layers with various composition ratios of Ni and Co metals. The composition ratio of the co-sputtered catalysts was evaluated by using an energy dispersive X-ray spectroscopy (EDS, Oxford). CNTs were grown by inductively coupled plasma-chemical vapor deposition (ICP-CVD).
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