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Fabrication of stainless steel mold using electro chemical fabrication (ECF) method for microfluidic biochip
- Authors
- Cho, Min Soo; Lim, Hyun Woo; Lee, Caroline Sunyong; Cho, Byung Ki; Cho, Young Sik; Park, Jin-Goo
- Issue Date
- Nov-2007
- Publisher
- IEEE
- Citation
- Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp 334 - 335
- Pages
- 2
- Indexed
- SCIE
SCOPUS
- Journal Title
- Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
- Start Page
- 334
- End Page
- 335
- Abstract
- In this paper, SUS mold was fabricated using both ECF method and FeCl 3 wet etching. The ECF mold showed the surface roughness values much better than that for FeCl3 etched mold. Therefore, SUS mold was successfully fabricated for the first time in micro-scale and multi-step patterns. Plastic replica was fabricated successfully using the metal mold.
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)