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Ohmic Contacts of Pd/Zn/Pt(or Pd)Au Materials to P-TYPE InP

Authors
Hwang, SungminJongin어영선
Issue Date
May-2005
Publisher
IEEE
Citation
IPRM`05
Indexed
OTHER
Journal Title
IPRM`05
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45961
DOI
10.1109/ICIPRM.2005.1517473
ISSN
10928669
Abstract
We investigated the contact resistivities of Au//M(=Pd or Pt)/Zn/Pd/p-InP, focusing on the role of the third metal, M. Both the lowest specific contact resistivity of 7/spl times/10/sup -6/ /spl Omega//spl middot/cm/sup 2/ and a flat diffusion front were obtained for a sample with a Au/Pt/Zn/Pd/p-InP contact material after annealing at 400/spl deg/C for 4 min.
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COLLEGE OF ENGINEERING SCIENCES > SCHOOL OF ELECTRICAL ENGINEERING > 1. Journal Articles

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ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)
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