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Experimental and modeling study of submicron particle removal from deep trenches
- Authors
- Bakhtari, K.; Guldiken, R.O.; Busnaina, A.A.; Park, J.G.
- Issue Date
- 2005
- Citation
- 2005 Proceedings - 10th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2005, pp.244 - 247
- Indexed
- SCOPUS
- Journal Title
- 2005 Proceedings - 10th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2005
- Start Page
- 244
- End Page
- 247
- ISSN
- 0000-0000
- Abstract
- [No abstract available]
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- There are no files associated with this item.
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)