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Metrology and removal of nanoparticles from 500 micron deep trenches
- Issue Date
- Dec-2004
- Publisher
- Scitec Publications Ltd.
- Keywords
- surface cleaning; nanoparticles; trenches; fluorescent particles metrology
- Citation
- Solid State Phenomena, v.103-104, pp 137 - 140
- Pages
- 4
- Indexed
- SCIE
SCOPUS
- Journal Title
- Solid State Phenomena
- Volume
- 103-104
- Start Page
- 137
- End Page
- 140
- ISSN
- 1012-0394
1662-9779
- Files in This Item
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)