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Wafer-scale MoS2 monolayer growth on SiO2 substrate by modified atomic layer deposition technique

Authors
박태주
Issue Date
27-Dec-2018
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/5927
Place
부산 해운대 그랜드 호텔
Conference Name
Atomic Craft and Interfaces Workshop
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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Park, Tae Joo
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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