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Atomic Layer Deposition of Pt on Surface Deactivated by Fluorocarbon Implantation: Investigation of Growth Mechanism
- Authors
- 김우희
- Issue Date
- 3-Nov-2020
- Publisher
- AMER CHEMICAL SOC
- Citation
- CHEMISTRY OF MATERIALS, v.32, no.22, pp.9696 - 9703
- Indexed
- SCIE
SCOPUS
- Journal Title
- CHEMISTRY OF MATERIALS
- Volume
- 32
- Number
- 22
- Start Page
- 9696
- End Page
- 9703
- ISSN
- 0897-4756
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Related Researcher
- Kim, Woo Hee
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)