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Thermo-optical optimization of extreme-ultraviolet pellicles for future generations
- Issue Date
- Oct-2017
- Publisher
- SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
- Keywords
- pellicle; extreme ultraviolet; stress; film; finite element method
- Citation
- JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.16, no.4
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
- Volume
- 16
- Number
- 4
- ISSN
- 1932-5150
- Abstract
- The thermo-optical optimization of extreme-ultraviolet pellicles for 3 nm node or smaller is described. Various material and multilayer structure candidates for the optimized pellicles are simulated using a finite element method. The result shows that a silicon-cored pellicle has relatively high transmission, whereas a graphene-cored pellicle shows relatively low stress compared with its material tensile strength. (c) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
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