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DC 스퍼터링을 이용한 소다라임 유리 기판상에2차원 황화텅스텐 박막 형성 공정DC Sputtering Process of 2-Dimensional Tungsten Disulfide Thin Films on Soda-Lime Glass Substrates
- Other Titles
- DC Sputtering Process of 2-Dimensional Tungsten Disulfide Thin Films on Soda-Lime Glass Substrates
- Issue Date
- 2018
- Publisher
- 한국반도체디스플레이기술학회
- Keywords
- Tungsten Disulfide (WS2); DC Sputtering; Rapid Thermal Processing (RTP); Soda-Lime Glass.
- Citation
- 반도체디스플레이기술학회지, v.17, no.3, pp.31 - 35
- Journal Title
- 반도체디스플레이기술학회지
- Volume
- 17
- Number
- 3
- Start Page
- 31
- End Page
- 35
- ISSN
- 1738-2270
- Abstract
- Tungsten disulfide(WS2) thin films were directly deposited by direct-current(DC) sputtering and annealed by rapid thermal processing(RTP) to materialize two-dimensional p-type transition metal dichalcogenide (TMDC) thin films on soda-lime glass substrates without any complicated exfoliation/transfer process. WS2 thin films deposited at various DC sputtering powers from 80 W to 160W were annealed at different temperatures from 400 ℃ to 550 ℃ considering the melting temperature of soda-lime glass. The optical microscope results showed the stable surface morphologies of the WS2 thin films without any defects. The X-ray photoelectron spectroscopy (XPS) results and the Hall measurement results showed stable binding energies of W and S and high carrier mobilities of WS2 thin films.
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Collections - IT융합대학 > 전자공학과 > 1. Journal Articles
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