Pulsed-DC magnetron sputtering of intrinsic ZnO film and its application to CIS solar cell
- Authors
- Lee, Yeon Joo; Cho, Eou-Sik; Kwon, Sang Jik
- Issue Date
- Apr-2016
- Publisher
- PERGAMON-ELSEVIER SCIENCE LTD
- Keywords
- Intrinsic zinc oxide (i-ZnO); Pulsed-DC sputtering; CIS solar cell; Deposition rate
- Citation
- VACUUM, v.126, pp.91 - 100
- Journal Title
- VACUUM
- Volume
- 126
- Start Page
- 91
- End Page
- 100
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/8428
- DOI
- 10.1016/j.vacuum.2016.01.017
- ISSN
- 0042-207X
- Abstract
- To create an intermediate layer in CuInSe2(CIS)-based solar cells, an intrinsic zinc oxide(i-ZnO) thin film was deposited on a glass substrate and a cadmium sulfide(CdS) buffer layer using an in-line pulsed-DC sputtering. In comparison with i-ZnO films sputtered using RF power, i-ZnO films sputtered using pulsed DC power showed much higher deposition rates and similar structural characteristics, without causing any damage to the CdS buffer layer. During pulsed-DC sputtering, the O-2/Ar gas ratio, reverse time, and pulse frequency were changed to optimize the process parameters. From the transmittance and scanning electron microscope(SEM) images, the optimized i-ZnO film was obtained at an O-2/Ar gas ratio of 1%, a pulsed frequency of 200 kHz, and a reverse time of 1.3 mu s. For showing the feasibility, it was applied to the fabrication of a CIS solar cell which was processed using the two step method by the rapid thermal processing (RTP) annealing of Cu-In stacked layers. It showed a possibility of the pulsed-DC sputtered ZnO as an intermediate layer of a CIS solar cell even though a cell efficiency was shown with a low value of 2.2% due to an early stage of our study in the two step CIS process. (C) 2016 Elsevier Ltd. All rights reserved.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - IT융합대학 > 전자공학과 > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.