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Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas Go to Link

Oh, Se-Jin; Choi, Ik-Jin; Kim, Jin-Yong; Chung, Chin-Wook

ArticleIssue Date2012CitationMeasurement Science and Technology, v.23, no.8, pp 1 - 6PublisherInstitute of Physics and the Physical Society

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Electron energy flux control using dual power in side-type inductively coupled plasma Go to Link

Bang, Jin-Young; Kim, Jin-Yong; Chung, Chin-Wook

ArticleIssue Date2011CitationPhysics of Plasmas, v.18, no.7, pp 1 - 5PublisherAmerican Institute of Physics

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Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas Go to Link

Kim, Young-Cheol; Kim, June Young; Lee, Hyo-Chang; Kim, Yu-Sin; Kim, Jin-Yong; Cho, Sung-Won; Chung, Chin-Wook

ArticleIssue Date2015CitationApplied Physics Letters, v.106, no.7, pp 1 - 3PublisherAmerican Institute of Physics

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Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring Go to Link

Kim, Jin-Yong; Chung, Chin-Wook

ArticleIssue Date2015CitationReview of Scientific Instruments, v.86, no.12, pp 1 - 5PublisherAmerican Institute of Physics

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Transition of electron kinetics in weakly magnetized inductively coupled plasmas Go to Link

Kim, Jin-Yong; Lee, Hyo-Chang; Kim, Young-Do; Kim, Young-Cheol; Chung, Chin-Wook

ArticleIssue Date2013CitationPhysics of Plasmas, v.20, no.10, pp 1 - 6PublisherAmerican Institute of Physics

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Wireless wafer-type probe system for measurement of two-dimensional plasma parameters and spatial uniformity Go to Link

Kim, Jin-Yong; Oh, Se-Jin; Kim, Young-Cheol; Choi, Ik-Jin; Chung, Chin-Wook

ArticleIssue Date2013CitationMeasurement Science and Technology, v.24, no.9, pp 1 - 9PublisherInstitute of Physics and the Physical Society

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Browsing by Kim, Jin-YongAuthor

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