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SCIESCOPUS

Characterization of Ru layer for capping/buffer application in EUVL mask Go to Link

Kim, Tae Geun; Lee, Seung Yoon; Kim, Chung Yong; Park, In-Sung; Kang, In-Yong; Lee, Nae-Eung; Chung, Yong-Chae; Ahn, Jinho

ArticleIssue Date2006CitationMicroelectronic Engineering, v.83, no.4-9, pp 688 - 691PublisherElsevier BV

SCIESCOPUS

Direct Probing of Cross-Plane Thermal Properties of Atomic Layer Deposition Al2O3/ZnO Superlattice Films with an Improved Figure of Merit and Their Cross-Plane Thermoelectric Generating Performance Go to Link

Park, No-Won; Lee, Won-Yong; Yoon, Yo-Seop; Ahn, Jay-Young; Lee, Jung-Hoon; Kim, Gil-Sung; Kim, Tae Geun; Choi, Chel-Jong; Park, Jin-Seong; Saitoh, Eiji, et al.

ArticleIssue Date2018CitationACS APPLIED MATERIALS & INTERFACES, v.10, no.51, pp.44472 - 44482PublisherAMER CHEMICAL SOC

SCIESCOPUS

Dry etching of extreme ultraviolet lithography mask structures in inductively coupled plasmas Go to Link

Kim, Do-Yoon; Lee, Hag Joo; Jung, Ho Young; Lee, Nae Eung; Kim, Tae Geun; Kim, Byung-Hun; Ahn, Jinho; Kim, Chung Ywong

ArticleIssue Date2008CitationJournal of Vacuum Science and Technology A, v.26, no.4, pp 857 - 860PublisherAmerican Institute of Physics

SCIESCOPUS

Effect of Attenuated Phase Shift Mask Structure on Extreme Ultraviolet Lithography Go to Link

Shin, Hyun-Duck; Jeoung, Chang Young; Kim, Tae Geun; Lee, Sangsul; Park, In-Sung; Ahn, Jinho

ArticleIssue Date2009CitationJapanese Journal of Applied Physics, v.48, no.6, pp 1 - 4PublisherIOP Publishing Ltd

SCIESCOPUS

Improvement of imaging properties by optimizing the capping structure in extreme ultraviolet lithography Go to Link

Jeong, Chang Young; Lee, Sangsul; Shin, Hyun-Duck; Kim, Tae Geun; Ahn, Jinho

ArticleIssue Date2009CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.27, no.6, pp 2922 - 2926PublisherAmerican Institute of Physics

SCISCIESCOPUS

Influence of MEEF change on the mask shadowing effect in extreme ultraviolet lithography Go to Link

Jeong, Chang Young; Lee, Sangsul; Shin, Hyun-Duck; Kim, Tae Geun; Ahn, Jinho

ArticleIssue Date2010CitationMicroelectronic Engineering, v.87, no.11, pp 2134 - 2138PublisherElsevier BV

SCIESCOPUS

Novel absorber stack for minimizing shadow effect in extreme ultraviolet mask Go to Link

Kim, Tae Geun; Kim, Byung Hun; Kang, In-Yong; Chung, Yong-Chae; Ahn, Jinho; Lee, Seung Yoon; Park, In-Sung; Kim, Chung Yong; Lee, Nae-Eung

ArticleIssue Date2006CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.24, no.6, pp 2820 - 2823PublisherAmerican Institute of Physics

SCIESCOPUS

Polymerizable Supramolecular Approach to Highly Conductive PEDOT:PSS Patterns Go to Link

Kim, Tae Geun; Ha, Su Ryong; Choi, Hyosung; Uh, Kyungchan; Kundapur, Umesha; Park, Sumin; Lee, Chan Woo; Lee, Sang-hwa; Kim, Jaeyong; Kim, Jong-Man

ArticleIssue Date2017CitationACS Applied Materials & Interfaces, v.9, no.22, pp 19231 - 19237PublisherAmerican Chemical Society

SCIESCOPUSKCI

Study of a thin Al2O3/TaN absorber stack on Ru-capped multilayers

Kim, Tae Geun; Kim, Byung Hun; Kang, In-Yong; Chung, Yong-Chae; Ahn, Jinho; Lee, Seung Yoon; Park, In-Sung; Kim, Chung Yong; Lee, Nae-Eung

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.49, pp S721 - S725Publisher한국물리학회

SCIESCOPUS

Surface-modified ultra-thin indium zinc oxide films with tunable work function for efficient hole transport in flexible indoor organic photovoltaics Go to Link

Park, Jae Wan; Takaloo, Ashkan Vakilipour; Kim, Sang Hyeon; Son, Kyung Rock; Kang, Dae Yun; Kang, Song Kyu; Lee, Cheong Beom; Choi, Hyosung; Shim, Jae Won; Kim, Tae Geun

ArticleIssue Date2021CitationJournal of Power Sources, v.489, pp.1 - 11PublisherElsevier

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Browsing by Kim, Tae GeunAuthor

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