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Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode Go to Link open access

Toan, Nguyen Van; Shimazaki, Tsuyoshi; Inomata, Naoki; Song, Yunheub; Ono, Takahito

ArticleIssue Date2017CitationMicromachines, v.8, no.10PublisherMultidisciplinary Digital Publishing Institute (MDPI)

SCIESCOPUS

Electrostatically Driven Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition Go to Link

Nguyen Van Toon; Zhao, Dong; Inomata, Naoki; Toda, Masaya; Song, Yun Heub; Ono, Takahito

ArticleIssue Date2019CitationPHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, v.216, no.14, pp.1 - 8PublisherWILEY-V C H VERLAG GMBH

SCISCIESCOPUS

Fabrication and evaluation of capacitive silicon resonators with piezoresistive heat engines Go to Link

Nguyen Van Toan; Nguyen Van Nha; Song, Yunheub; Ono, Takahito

ArticleIssue Date2017CitationSensors and Actuators, A: Physical, v.262, pp 99 - 107PublisherElsevier BV

SCIESCOPUS

Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process Go to Link

Nguyen Van Toan; Hahng, Shim; Song, Yunheub; Ono, Takahito

ArticleIssue Date2016CitationMicromachines, v.7, no.5, pp 1 - 9PublisherMultidisciplinary Digital Publishing Institute (MDPI)

SCIESCOPUS

Impact of etch angles on cell characteristics in 3D NAND flash memory Go to Link

Oh, Young-Taek; Kim, Kyu-Beom; Shin, Sang-Hoon; Sim, Hahng; Toan, Nguyen Van; Ono, Takahito; Song, Yun Heub

ArticleIssue Date2018CitationMicroelectronics Journal, v.79, pp 1 - 6PublisherElsevier BV

SCISCIESCOPUS

Investigation of the Impact of External Stress on Memory Characteristics by Modifying the Backside of Substrate Go to Link

Oh, Young-Taek; Sim, Jae-Min; Nguyen Van Toan; Kino, Hisashi; Ono, Takahito; Tanaka, Tetsu; Song, Yun Heub

ArticleIssue Date2019CitationIEEE Transactions on Electron Devices, v.66, no.4, pp 1741 - 1746PublisherInstitute of Electrical and Electronics Engineers

SCOPUS

Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator Go to Link

Shim, Hang; Sakamoto, Kei; Inomata, Naoki; Toda, Masaya; Toan,Nguyen Van; Song, Yun Heub; Ono, Takahito

ArticleIssue Date2019CitationInternational Solid-State Sensors, Actuators and Microsystems Conference, pp 1698 - 1700PublisherIEEE

SCOPUS

Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition Go to Link

Toan, Nguyen Van; Zhao, Dong; Inomata, Naoki; Toda, Masaya; Song, Yun Heub; Ono, Takahito

ArticleIssue Date2019CitationInternational Solid-State Sensors, Actuators and Microsystems Conference, pp 1709 - 1711PublisherIEEE

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Browsing by Ono, TakahitoAuthor

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