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Results 311-320 of 343 (Search time: 0.003 seconds).
high-Speed measurement for Pulsed Plasma Using the Floating Harmonic Method
정진욱
Conference
Issue Date
2023
Citation
16th international conference on plasma nano technoligy & science
Publisher
일본 ISPlasma
Place
gifu university(japan)
병렬 평판형 헬리컬 공진기를 통한 플라즈마 균일도 개선
정진욱
Conference
Issue Date
2023
Citation
2023년 반도체디스플레이 춘계학술대회
Publisher
한국반도체디스플레이기술학회
Place
제주대학교 아라컨벤션홀 대회의실(제주)
Highly efficient plasma generation in inductively coupled plasmas by the parallel resonance
정진욱
Conference
Issue Date
2022
Citation
제63회 한국진공학회 하계정기학술대회
Publisher
한국진공학회
Place
신화월드(제주)
Development of high ion density and uniformity plasma source for large scale descum processing
정진욱
Conference
Issue Date
2022
Citation
The 20th international Symposium on Microelectronics and Packagin
Publisher
ISMP 패키징학회
Place
한화리조트(부산)
A study on the measurement of focus ring thickness in the inductively coupled plasma
정진욱
Conference
Issue Date
2022
Citation
제63회 한국진공학회 하계정기학술대회
Publisher
한국진공학회
Place
신화월드(제주)
무선 하이브리드 플라즈마 소스
정진욱
Conference
Issue Date
2022
Citation
제63회 한국진공학회 하계정기학술대회
Publisher
한국진공학회
Place
신화월드(제주)
Effects of RF-bias power on plasma parameters in a low gas pressure inductively coupled plasma
정진욱
Conference
Issue Date
2009
Citation
62th Gaseous Electronics Conference
Publisher
American physical Society
Place
US
Experimental observation of the transition from nonlocal to local kineticsin inductively coupled plasma
정진욱
Conference
Issue Date
2009
Citation
62th Gaseous Electronics Conference
Publisher
American physical Society
Place
saratoga springs, NY U.S.A
Enhancement of photoresist etching by controlling the impedance between bias electrode and ground in an inductively coupled plasma
정진욱
Conference
Issue Date
2022
Citation
Korean international semiconductor conference on manufacturing technology 2022
Publisher
KISM 2022
Place
파라다이스 호텔(부산)
Measurement of the total energy losses per electron-ion lost in argon,helium and oxygen inductively coupled plasmas
정진욱
Conference
Issue Date
2009
Citation
62th Gaseous Electronics Conference
Publisher
American Physical Society
Place
saratoga springs,NY U.S.A
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63rd Gaseous Electronics Conferen...
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제64회 한국진공학회
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66th Gaseous Electronics Conference
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제 44회 한국진공학회(The 44th Winter Annu...
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