한국어
LIBRARY
Communities & Collections
Researchers
Titles
Issue Date
Journals
검색
Search
All of ScholarWorks
서울 공과대학
서울 전기공학전공
2. Conference Papers
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-10 of 343 (Search time: 0.025 seconds).
Interpolation for two-dimensional spatial distribution estimation of plasma densities in a cylindrical RF discharge reactor
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
유도 결합 플라즈마에서 그리드 시스템을 통한 전자 빔의 생성 연구
정진욱
Conference
Issue Date
2021
Citation
한국진공학회 제61회 하계정기학술대회
Publisher
한국진공학회
Place
제주도 소노캄
A study on the scale up of plasma processing chamber by using global model
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
Study of plasma parameters of low global warming potential gases and characteristics of silicon oxide etch in inductively coupled plasma
정진욱
Conference
Issue Date
2015
Citation
14th International Union of Materials Research Societies-International Conference on Advanced Materials
Publisher
IUMRS
Place
Jeju, Korea
Effect of plasma density distribution for polymer surface etching at low frequency (50 kHz) O2+CF4 capacitive discharge
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
Collisionless electron heating and control of electron energy distribution by adding pulsed inductive fields in capacitively coupled plasma
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
Effect of dual frequency rf power in an inductively coupled plasma
정진욱
Conference
Issue Date
2016
Citation
69th Annual Gaseous Electronics Conference
Publisher
American Physical Society
A study on the correlations between external discharge parameters and plasma characteristics in an inductively coupled plasma using transformer circuit model
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
Spatial characteristics of plasma parameters in a weak dc magnetic field in solenoidal inductive discharge
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
A new method for measuring transferred power to plasma in inductive discharge
정진욱
Conference
Issue Date
2012
Citation
4th ICMAP
Publisher
KVS
Place
제주도
1
2
3
4
next
35
Discover
Date Issued
2020 - 2023
74
2010 - 2019
230
2002 - 2009
39
Journal
63rd Gaseous Electronics Conferen...
13
67th Annual Gaseous Electronics C...
13
62th Gaseous Electronics Conference
11
The 72nd Annual Gaseous Electroni...
11
제64회 한국진공학회
11
64th Annual Gaseous Electronics C...
10
66th Gaseous Electronics Conference
10
Gaseous Electronics Conference
10
제 44회 한국진공학회(The 44th Winter Annu...
10
4th ICMAP
9
.
next >
BROWSE
한국어
Communities & Collections
Researchers
Titles
Journals
LIBRARY