Development of a Au-free process using Mo-based metallization for high-power AlGaN/GaN-on-Si heterostructure field-effect transistors
- Authors
- Choi, Shinhyuk; Lee, Jae-Gil; Kang, Youngjin; Cha, Ho-Young; Kim, Hyungtak; Cho, Chun-Hyung
- Issue Date
- Aug-2014
- Publisher
- KOREAN PHYSICAL SOC
- Keywords
- AlGaN/GaN; Heterostructure FET; Ohmic contacts; Au-free process
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.65, no.4, pp.526 - 531
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 65
- Number
- 4
- Start Page
- 526
- End Page
- 531
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/16644
- DOI
- 10.3938/jkps.65.526
- ISSN
- 0374-4884
- Abstract
- A Au-free ohmic contact process for fabricating AlGaN/GaN heterostructure field-effect transistors (HFETs) on Si substrates was developed by using Mo-based metallization. We investigated Si/Ti/Al/Mo metal stacks for ohmic metallization where the Ti/Al thickness ratio and the annealing temperature were varied. The optimized metal stack and annealing conditions were a Si/Ti/Al/Mo stack with 5/40/60/50 nm thicknesses and rapid thermal annealing in a N-2 ambient at 900 A degrees C for 30 sec, which resulted in a contact resistance of 1.24 Omega A center dot mm, a sheet resistance of 410 Omega/sq and a specific contact resistivity of 3.76 x 10(-5) Omega A center dot cm(2). Devices fabricated using the optimized Mo-based, Au-free ohmic contact process exhibited comparable characteristics with higher breakdown voltage to those of devices fabricated using a conventional Au-based ohmic contact process.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Science and Technology > Department of Electronic and Electrical Engineering > 1. Journal Articles
- College of Engineering > School of Electronic & Electrical Engineering > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/16644)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.