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A Sensitivity-controllable Shear-stress Sensor with 2 Sets of+45/-45 Degree Semiconductor Resistor-sensor Pair

Authors
Cho, Chun-HyungCha, Ho-YoungSung, Hyuk-Kee
Issue Date
Apr-2018
Publisher
IEEK PUBLICATION CENTER
Keywords
Semiconductor stress-sensor; shear-stress; sensitivity; resistor sensor
Citation
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.18, no.2, pp.139 - 145
Journal Title
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
Volume
18
Number
2
Start Page
139
End Page
145
URI
https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/3875
DOI
10.5573/JSTS.2018.18.2.139
ISSN
1598-1657
Abstract
In this paper, we investigated the most enhanced shear-stress sensor by using 2 mid-points measurements in a separate +/- 45 degrees semiconductor resistor-sensor pair. Compared to our latest works, we added an additional +/- 45 degrees semiconductor resistor-sensor pair upside down, and the sensitivity was observed to be significantly increased approximately by 100% (2 times) compared to the result for our latest work. Also, we validated our results analytically by error analysis in sensitivity. Furthermore, we proposed a simple and efficient measurement-technique for the shear-stress calculation in which we just needed to measure voltage between the midpoints without the need for calculating the voltage ratio in each resistor-sensor pair. By this technique, we could increase the shear-sensitivity by controlling the common applied voltage between the sensor pairs. As an example, for the applied voltage of 8V between the pair, the sensitivity showed a significant increase by 300 % (4 times).
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College of Engineering > School of Electronic & Electrical Engineering > 1. Journal Articles
College of Science and Technology > Department of Electronic and Electrical Engineering > 1. Journal Articles

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Science & Technology (Department of Electronic & Electrical Convergence Engineering)
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