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Browsing by Busnaina, Ahmed.A.Author

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SCIESCOPUS

Acoustic cavitation behavior in isopropyl alcohol added cleaning solution Go to Link

Kang, Bong Kyun; Jeong, Ji hyun; Kim, Min su; Sohn, Hong Seong; Busnaina, Ahmed.A.; Park, Jin-Goo

ArticleIssue Date2013CitationSolid State Phenomena, v.195, pp 169 - 172PublisherScitec Publications Ltd.

SCOPUS

Effect of particle deposition and wet/dry cleaning methods on particle removal efficiency Go to Link

Kim, Tae Gon; Hu, Shan; Busnaina, Ahmed.A.; Park, Jin-Goo

ArticleIssue Date2007CitationECS Transactions, v.11, no.2, pp 361 - 367PublisherElectrochemical Society, Inc.

SCIESCOPUS

Evaluation of very dilute alkaline solutions for wafer cleaning with megasonic irradiation Go to Link

Jeong, Ji hyun; Kang, Bong Kyun; Kim, Min su; Sohn, Hong Seong; Busnaina, Ahmed.A.; Park, Jin-Goo

ArticleIssue Date2013CitationSolid State Phenomena, v.195, pp 181 - 184PublisherScitec Publications Ltd.

SCIESCOPUS

Pattern collapse and particle removal forces of interest to semiconductor fabrication process Go to Link

Kim, Tae Gon; Wostyn, Kurt; Park, Jin-Goo; Mertens, Paul.W.; Busnaina, Ahmed.A.

ArticleIssue Date2009CitationSolid State Phenomena, v.145-146, pp 47 - 50PublisherScitec Publications Ltd.

SCOPUS

Quantitative measurement of pattern collapse and particle removal force Go to Link

Kim, Tae Gon; Wostyn, Kurt L.; Mertens, P.; Busnaina, Ahmed.A.; Park, Jin-Goo

ArticleIssue Date2007CitationECS Transactions, v.11, no.2, pp 123 - 129PublisherElectrochemical Society, Inc.

SCIESCOPUS

Reevaluation of hydrogen gas dissolved cleaning solutions in single wafer megasonic cleaning Go to Link

Kang, Bong Kyun; Lee, Seung Ho; Kim, In Jung; Choi, Eun Suck; Kim, Bong Woo; Busnaina, Ahmed.A.; Hattori, Takeshi; Park, Jin-Goo

ArticleIssue Date2009CitationECS Transactions, v.25, no.5, pp 273 - 279PublisherElectrochemical Society, Inc.

SCIESCOPUS

Study of highly selective and sensitive microarray structure based on hydrophilic/hydrophobic SAMs (Self Assembled Monolayers)Go to Link

Lee, Jung hwan; Cho, Si hyeong; Lim, Hyun woo; Kim, Sungwoo; Busnaina, Ahmed.A.; Lee, Hea yeon; Park, Jin-Goo

ArticleIssue Date2013CitationSolid State Phenomena, v.195, pp 82 - 85PublisherScitec Publications Ltd.

Tribological reliability of vapor deposited 1H,1H,2H,2H- Perfluorodecyltrichlorosilane by AFM

Kim, Tae Gon; Busnaina, Ahmed.A.; Park, Jin-Goo

ConferenceIssue Date2007PlaceSan Francisco, CA

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Browsing by Busnaina, Ahmed.A.Author

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