ScholarWorks@Hanyang University ERICA Campus: Browsing ScholarWorks

Browsing by Lee, Jeong-MinAuthor

Showing results 1 to 13 of 13

SCIESCOPUS

Area-selective atomic layer deposition of Al2O3 thin films for metal versus dielectric selectivity using vapor-dosed alkanethiols Go to Link

Lee, Jinseon; Oh, Jiwoo; Lee, Jeongbin; Lee, Jeong-Min; Kim, Hyun Gu; Cho, Byungchul; Kim, Min Su; Kim, Woo-Hee

ArticleIssue Date2025CitationSurfaces and Interfaces, v.67, no.15, pp 1 - 7PublisherElsevier B.V.

SCIESCOPUS

Area-Selective Atomic Layer Deposition of High-Quality Ru Thin Films by Chemo-Selective Adsorption of Short Alkylating Agents,Go to Link

Lee, Jeong-Min; Lee, Seo-Hyun; Oh, Jieun; Kim, Woo-Hee

ArticleIssue Date2023CitationMaterials Letters, v.333, pp 1 - 4PublisherElsevier BV

SCIESCOPUS

Area-selective atomic layer deposition of Ru thin films using phosphonic acid self-assembled monolayers for metal/dielectric selectivity Go to Link

Lee, Seo-Hyun; Lee, Jeong-Min; Lee, Ji Hun; Kwak, Junghun; Chung, Sung-Woong; Kim, Woo - Hee

ArticleIssue Date2022CitationMaterials Letters, v.328, pp 1 - 4PublisherElsevier BV

SCOPUS

Area-Selective Atomic Layer Deposition of Ruthenium Thin Films Using Aldehyde Inhibitors

Park, Haneul; Oh, Jieun; Lee, Jeong-Min; Kim, Woo-Hee

ArticleIssue Date2023Citation2023 IEEE International Interconnect Technology Conference and IEEE Materials for Advanced Metallization Conference, IITC/MAM 2023 - Proceedings, pp 1 - 3PublisherInstitute of Electrical and Electronics Engineers Inc.

SCIESCOPUS

Atomic layer etching of high-k oxide thin films using hexafluoroacetylacetone and oxygen radicals Go to Link

Lee, Jeongbin; Oh, Jieun; Kim, Jung-Tae; Oh, Jiwoo; Lee, Jeong-Min; Kim, Woo-Hee

ArticleIssue Date2025CitationCHEMICAL ENGINEERING JOURNAL, v.514, pp 1 - 9PublisherELSEVIER SCIENCE SA

SCIESCOPUS

Chemical mechanism of oxidative etching of ruthenium: Insights into continuous versus self-limiting conditions Go to Link

Yu, Neung-Kyung; Lee, Jeong-Min; Kim, Woo-Hee; Shong, Bonggeun

ArticleIssue Date2023CitationApplied Surface Science, v.636, pp 1 - 12PublisherElsevier BV

SCIESCOPUS

Enhanced Deposition Selectivity of High-<i>k</i> Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors Go to Link

Lee, Jeong-Min; Lee, Seo-Hyun; Lee, Ji Hun; Kwak, Junghun; Lee, Jinhee; Kim, Woo-Hee

ArticleIssue Date2024CitationACS Applied Materials & Interfaces, v.16, no.28, pp 1 - 10PublisherAmerican Chemical Society

SCIESCOPUS

Highly area-selective atomic layer deposition of device-quality Hf1-xZrxO2 thin films through catalytic local activation Go to Link

Kim, Hyo-Bae; Lee, Jeong-Min; Sung, Dougyong; Ahn, Ji-Hoon; Kim, Woo-Hee

ArticleIssue Date2024CitationChemical Engineering Journal, v.488, pp 1 - 10PublisherElsevier B.V.

SCIESCOPUS

Inherently Area-Selective Atomic Layer Deposition of SiO2 Thin Films to Confer Oxide Versus Nitride Selectivity Go to Link

Lee, Jinseon; Lee, Jeong-Min; Oh, Hongjun; Kim, Changhan; Kim, Jiseong; Kim, Dae Hyun; Shong, Bonggeun; Park, Tae Joo; Kim, Woo-Hee

ArticleIssue Date2021CitationAdvanced Functional Materials, v.31, no.33, pp 1 - 10PublisherJohn Wiley & Sons Ltd.

SCIESCOPUS

Inhibitor-free area-selective atomic layer deposition of SiO2 through chemoselective adsorption of an aminodisilane precursor on oxide versus nitride substrates Go to Link

Lee, Jeong-Min; Lee, Jinseon; Oh, Hongjun; Kim, Jiseong; Shong, Bonggeun; Park, Tae Joo; Kim, Woo-Hee

ArticleIssue Date2022CitationApplied Surface Science, v.589, pp 1 - 9PublisherElsevier BV

SCIESCOPUS

Oxidation-State-Dependent Selective Atomic Layer Etching of Metal Oxides Go to Link

Lee, Jeongbin; Noh, Jae-Hong; Kim, Jung-Tae; Lee, Dongjun; Choi, Ji Hyeon; Lee, Jeong-Min; Ahn, Ji-Hoon; Park, Tae Joo; Kim, Woo-Hee

ArticleIssue Date2025CitationACS Applied Materials and Interfaces, v.17, no.26, pp 38608 - 38618PublisherAmerican Chemical Society

SCIESCOPUSKCI

Selective metal passivation by vapor-dosed phosphonic acid inhibitors for area-selective atomic layer deposition of SiO2 thin films Go to Link open access

Lee, Jeong-Min; Lee, Seo-Hyun; Lee, Ji Hun; Kwak, Junghun; Lee, Jinhee; Kim, Woo-Hee

ArticleIssue Date2025CitationNano Convergence, v.12, no.1, pp 1 - 12PublisherKorea Nano Technology Research Society

SCIESCOPUS

Selective nitride passivation using vapor-dosed aldehyde inhibitors for area-selective atomic layer deposition Go to Link

Park, Haneul; Oh, Jieun; Lee, Jeong-Min; Kim, Woo-Hee

ArticleIssue Date2024CitationMaterials Letters, v.366, pp 1 - 4PublisherElsevier BV

RSS_1.0 RSS_2.0 ATOM_1.0

55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Browsing by Lee, Jeong-MinAuthor

BROWSE