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Removing W Polymer Residue from BEOL Structures using DSP+ (Dilute Sulfurec-Peroxide-HF) Mixture - A Case Study
- Authors
- Lee, Hun-Hee; Yun, Min-Sang; Lee, Hyun-Wook; Park, Jin-Goo
- Issue Date
- Jan-2013
- Publisher
- Scitec Publications Ltd.
- Citation
- Solid State Phenomena, v.195, pp.128 - 131
- Indexed
- SCOPUS
- Journal Title
- Solid State Phenomena
- Volume
- 195
- Start Page
- 128
- End Page
- 131
- ISSN
- 1012-0394
- Files in This Item
- There are no files associated with this item.
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)