Kim, In-Seon; Kim, Guk-Jin; Yeung, Michael; Barouch, Eytan; Kim, Seong-Wook; Oh, Hye-Keun
ArticleIssue Date2016CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.15, no.3, pp.33504 - 33504PublisherSPIE - International Society for Optical Engineering