ArticleIssue Date2018CitationMetallurgical and Materials Transactions B: Process Metallurgy and Materials Processing Science, v.49, no.2, pp 514 - 518PublisherASM International
ArticleIssue Date2018CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.36, no.2, pp 1 - 7PublisherAmerican Institute of Physics