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Results 11-20 of 24 (Search time: 0.004 seconds).
Reactivity and Removal Mechanism of Copper with Various Orgainc Additives in Copper CMP Slurry
박진구
Conference
Issue Date
2004
Place
San Francisco, CA
기계적, 전기화학적 방법을 통한 slurry에 첨가되는 pH 적정제가 Cu CMP에 미치는 영향분석
박진구
Conference
Issue Date
2004
Place
인하대학교
Evaluation of Pattern Dependent Copper Recess in Cu CMP
박진구
Conference
Issue Date
2004
Place
Santa Clara, CA
The Removal of Nanoparticles from Submicron Trenches
박진구
Conference
Issue Date
2004
Adhesion of Alumina Slurry Particles on Wafer Surfaces
박진구
Conference
Issue Date
2004
Place
San Francisco, CA
Pad Conditioning에서 발생되는 abraded pad particles이 미치는 영향
박진구
Conference
Issue Date
2004
Place
인하대학교
고 연마율을 위한 MEMS CMP용 Cu 슬러리의 특성평가
박진구
Conference
Issue Date
2004
Place
강릉대학교
Hot Embossing에서의 substrate 두께와 공정온도와의 관계
박진구
Conference
Issue Date
2004
Place
인하대학교
Hot Embossing을 이용한 플라스틱 CE칩 제작
박진구
Conference
Issue Date
2004
Place
인하대학교
다양한 슬러리 조건에서의 Ru 박막의 etching 및 polishing 거동
박진구
Conference
Issue Date
2004
Place
인하대학교
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Busnaina, Ahmed A
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Lee, Do hyung
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Eom, Dae hong
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Hong, Yi Koan
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Kwon, D.J.
1
Lim, Geun Bae
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Subject
Abrasives
1
CFD
1
Chemical mechanical planarization
1
chemical mechanical planarization
1
CMP
1
Computational fluid dynamics
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computational fluid dynamics
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Computer simulation
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contact angles
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1
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Japanese Journal of Applied Physics
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Key Engineering Materials
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scie
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