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접촉각 측정을 통한 불화유기 박막의 특성평가
박진구
Conference
Issue Date
1999
Place
금오공과대학교
계면 활성제 첨가한 암모니아 수용액의 온도에 따른 소수성 실리콘 웨이퍼와의 반응성
박진구
Conference
Issue Date
1999
Place
금오공과대학교
Determination of optical properties of fluorocarbon polymer thin films by a variable angle spectroscopic ellipsometry
박진구
Conference
Issue Date
1999
Place
Boston, Massachusetts
The Reaction of H202 and Ozone in Ammonium Hydroxide (NH4OH) Solutions with Silicon Wafers
박진구
Conference
Issue Date
1999
Place
hawaii
Electrokinetic analysis of slurry particles and wafer surfaces and their interactions relevant to post cmp cleaning.
박진구
Conference
Issue Date
1999
Place
동경(일본)
TEOS 산화막 위에 기상증착을 통해 성장죈 불화유기박막의 특성평가
박진구
Conference
Issue Date
1999
Place
한양대
암모니아 수용액 내 과산화수소와 오존의 거동
박진구
Conference
Issue Date
1999
Place
금오공과대학교
기상증착과 PECVD를 이용한 불화유기박막의 증착
박진구
Conference
Issue Date
1999
Place
인하대학교
실리콘 기판위에 형성된 불화유기박막의 광학적 모델링
박진구
Conference
Issue Date
1999
Place
금오공과대학교
희석된 HF 수용액과 IPA, 계면활성제, 과산화수소를 첨가한 혼합액의 실리콘 산화막 식각속도에 대한연구
박진구
Conference
Issue Date
1999
Place
인하대학교
1
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